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Plasma Etching on Hardback by M. Sugawara
Plasma Etching on Hardback by M. Sugawara
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Plasma Etching

Fundamentals and Applications
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Hardback
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Description

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

Author Biography:

Professor Minoru Sugawara, Hachinohe Institute of Technology, Hachinohe-city, Aomori 031, Japan. Fax: (0) 178 25 1430
Release date Australia
May 28th, 1998
Author
Audience
  • Tertiary Education (US: College)
Illustrations
2 colour plates, 5 halftones, numerous line figures
Pages
356
Dimensions
163x242x23
ISBN-13
9780198562870
Product ID
2247940

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