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Epitaxy on Hardback by Marian A. Herman
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Epitaxy

Physical Principles and Technical Implementation
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Description

Epitaxy provides readers with a comprehensive treatment of the modern models and modifications of epitaxy, together with the relevant experimental and technological framework. This advanced textbook describes all important aspects of the epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy�s coverage of science and texhnology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization.
Release date Australia
January 22nd, 2004
Audience
  • General (US: Trade)
Illustrations
303 Illustrations, black and white; XV, 525 p. 303 illus.
Pages
525
Dimensions
156x234x30
ISBN-13
9783540678212
Product ID
5268704

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