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Glow-Discharge Hydrogenated Amorphous Silicon on Hardback by K. Tanaka
Glow-Discharge Hydrogenated Amorphous Silicon on Hardback by K. Tanaka
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Glow-Discharge Hydrogenated Amorphous Silicon

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Description

A graduate-level description of recent Japanese research on the chemistry of amorphous silicon film deposition associated with plasma CVD, a step in producing amorphous semiconductors. Reports on studies (of microscopic processes of gas-phase reaction as well as chemical reactions on the film growin
Release date Australia
November 30th, 1989
Author
Audiences
  • Postgraduate, Research & Scholarly
  • Professional & Vocational
Illustrations
X, 277 p.
Pages
277
Dimensions
156x234x17
ISBN-13
9780792303091
Product ID
2050819

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