Handbook of Ion Beam Processing Technology

Name: Handbook of Ion Beam Processing Technology
SKU: 7703646
Price: 550.99 AUD
Availability: InStock

Principles, Deposition, Film Modification and Synthesis

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Description

This book deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, and synthesis of material in thin film form. Contents include: Ion Beam Technology Gridded Broad-Beam Ion Sources ECR Sources Hall Effect Ion Sources Sputtering Phenomena Quantitative Sputtering Laser-Induced Fluorescence as a Tool for the Study of Ion Beam Sputtering Film Modification and Synthesis Etching with Directed Beams Topography Texturing Effects.

Release date Australia

December 31st, 1989

Author

Audience

Professional & Vocational

Country of Publication

United States

Imprint

William Andrew Publishing

Pages

456

Publisher

William Andrew Publishing

Dimensions

156x234x25

ISBN-13

9780815511991

Product ID

7703646

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Handbook of Ion Beam Processing Technology

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