This book exposes readers to the research work carried out in realization of High Accuracy Micro-Opto- Electro-Mechanical-(MOEM) Accelerometers. The book has been written with utmost clarity and explanations supported by large number of figures. It would be very much beneficial for the beginners as it covers overview of different classes of accelerometers. It would be also useful for the practicing engineers, post graduate students of aerospace engineering and researchers as issues related to the investigation, design and analysis of MOEM accelerometers are covered. The work presented here explores the usage of guided wave optical phenomena controlled by micromechanical structures to design accelerometer with sub-micro-g accuracy, high bandwidth and scale factor stability of the order of 1 ppm. It includes design and analysis of sensing element for intensity modulated, interferometric and closed loop MOEM accelerometer. The concluding chapter draws several inferences based on the studies presented in different chapters and possible avenues for the further work in area of MOEM accelerometers.