Non-Fiction Books:

Nanofabrication

Techniques and Principles
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Paperback / softback
$400.99
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Description

Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Release date Australia
January 28th, 2014
Audience
  • Professional & Vocational
Contributors
  • Edited by Maria Stepanova
  • Edited by Steven Dew
Illustrations
VIII, 344 p.
Pages
344
Dimensions
155x235x19
ISBN-13
9783709116661
Product ID
21894243

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