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Plasma-Surface Interactions and Processing of Materials

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Description

An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and chemistry of plasmas, plasma diagnostics, physical sputtering and chemical etching, plasma assisted deposition of thin films, ion and electron bombardment, and plasma processing of inorganic and polymeric materials. The book represents a concentration of a substantial amount of knowledge acquired in this area - knowledge which was hitherto widely scattered throughout the literature - and thus establishes a baseline reference work for both established and tyro research workers.
Release date Australia
October 1st, 2011
Audience
  • Professional & Vocational
Contributors
  • Edited by Alberto Gras-Marti
  • Edited by Daniel L. Flamm
  • Edited by Jose Antonio Valles-Abarca
  • Edited by O. Auciello
Edition
Softcover reprint of the original 1st ed. 1990
Illustrations
XIV, 558 p.
Pages
558
Dimensions
156x234x29
ISBN-13
9789401073691
Product ID
21690487

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