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Precursor Chemistry of Advanced Materials
Precursor Chemistry of Advanced Materials
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Precursor Chemistry of Advanced Materials

CVD, ALD and Nanoparticles
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Description

Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.
Release date Australia
February 12th, 2010
Audience
  • Professional & Vocational
Contributor
  • Edited by Roland A Fischer
Edition
Softcover reprint of hardcover 1st ed. 2005
Illustrations
XVII, 214 p.
Pages
214
Dimensions
156x234x12
ISBN-13
9783642056888
Product ID
11157863

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