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Spectroscopic Ellipsometry and Reflectometry on Hardback by Harland G Tompkins
Spectroscopic Ellipsometry and Reflectometry on Hardback by Harland G Tompkins
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Spectroscopic Ellipsometry and Reflectometry

A User's Guide
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Description

Ellipsometry is an optical technique used to measure thickness and optical properties of thin films. Single wave ellipsometry has been around for years, but now spectroscopic ellipsometry has entered the mainstream of industrial laboratories. This is a practical introduction to spectroscopic ellipsometry and the related technique of reflectometry. In addition to an introduction to the fundamentals, the book includes applications and case studies.

Author Biography:

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola. William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.
Release date Australia
April 6th, 1999
Audiences
  • Postgraduate, Research & Scholarly
  • Professional & Vocational
  • Undergraduate
Pages
248
Dimensions
160x240x20
ISBN-13
9780471181729
Product ID
2471608

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