Surface Metrology for Micro- and Nanofabrication

By:

Wei Gao

Format:

Paperback / softback

Series:

Micro and Nano Technologies

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Description

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

Author Biography:

Prof. Wei Gao is the Chair of the Precision Nanometrology Laboratory and Director of the Research Center for Precision Nanosystems at the Department of Fine Mechanics in the Graduate School of Engineering, Tohoku University, Japan. His research focuses on precision engineering, precision metrology, micro/nano-nanometrology, optical sensors, surface metrology, on-machine and in-process measurement, and motion measurement.

Release date Australia

October 21st, 2020

Author

Wei Gao

Audience

Professional & Vocational

Pages

448

Series

Micro and Nano Technologies

ISBN-13

9780128178508

Product ID

33410003

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