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Temperature Measurement during Millisecond Annealing by Denise Reichel
Temperature Measurement during Millisecond Annealing by Denise Reichel
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Temperature Measurement during Millisecond Annealing

Ripple Pyrometry for Flash Lamp Annealers
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Description

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Author Biography:

Dr. Denise Reichel currently works in technical sales and consulting for temperature measurement needs and as a lecturer for thermodynamics and heat and mass transfer.
Release date Australia
January 14th, 2016
Audience
  • Professional & Vocational
Edition
1st ed. 2015
Illustrations
77 Illustrations, color; XXV, 112 p. 77 illus. in color.
Pages
112
Series
Dimensions
148x210x8
ISBN-13
9783658113872
Product ID
24081530

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