Chemistry of Atomic Layer Deposition

By:

Sean Thomas Barry

Format:

Paperback / softback

Series:

de Gruyter Textbook

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Description

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

Author Biography:

Seán Thomas Barry, Carleton University, Ottawa, Canada.

Release date Australia

November 22nd, 2021

Author

Sean Thomas Barry

Audience

Tertiary Education (US: College)

Illustrations

20 Tables, black and white; 5 Illustrations, black and white; 70 Illustrations, color

Pages

113

Series

de Gruyter Textbook

ISBN-13

9783110712513

Product ID

35213408

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